What is Atomic Layer Etching? Atomic layer etching (ALE) is a highly controlled and selective etching technique that removes material layer by layer at the atomic scale. It is a cyclic process that ...

Mass-change processes are characterized by the removal of material through the use of mechanical, thermal, chemical, or electrical energy. 1 In most instances, the workpiece density is not altered; ...

There has been much research on the fabrication of nanochannels using local oxidation and consequent etching of silicon surfaces. Although this technique has been extensively demonstrated, it has the ...